In this paper, the new lapping slurry and sprucing slurry are introduced. As well as deliquescence degree of CLBO is fallen to least expensive. A whole new Performing engineering is also adopted. Following rough polishing, the concentration of ultra-precision polishing slurry is greater effectively. So does the extremely-precision sharpening pace, as well as the wiping speed is faster as opposed to deliquescence pace. The CLBO crystal floor roughness can reach 1nm and hold the floor excellent well. Accessibility via your establishment

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We summarized The present progress standing from the significant-electrical power DUV laser the two on the wavelength of FHG from the one-μm laser and at 193 nm. The latest progress from the stable-state/fiber laser, and also the nonlinear optical crystals, prompts not just the average ability but additionally the beam excellent (coherence) of the DUV lasers to an unprecedented stage.

For instance, The existing concave OC could get replaced by a plane mirror which could mitigate the ability density within the surface of M1 as well as diamond. Additionally, making use of high problems threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser at the 2nd Stokes wavelength can be substantial adequate, as well as its fantastic beam top quality, to generate the final DUV laser at 193 nm which has a large ordinary electrical power.

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On the opposite aspect, the ability scaling in the NIR laser is another aspect to enhance the normal power with the 193-nm DUV laser. Due to insufficient the superior-electricity amplification Answer with the NIR laser (as an example at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) may very well be applied to establish a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength along with getting relative greater ability [21]. Not too long ago, a diamond Raman laser confirmed its ability in accomplishing a high electricity in addition to a higher conversion effectiveness for the 1st Stokes of the one-μm laser [22,23], which means the chance to be used in the 193-nm DUV laser technology because of its high Raman attain and enormous frequency shift.

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In addition, combining the stable-state laser with other nonlinear approach for instance stimulated Raman scattering, NIR lasers might be realized at new wavelengths with higher ability and large beam high-quality, which was tested through the proof-of-theory experiment. This Raman laser plan presents a brand new route to the high-energy DUV laser, Specifically on the wavelength of 193 nm.

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Its UV absorption edge reaches 180 nm. The helpful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as huge as that of KDP. CLBO crystals can be developed from your stoichiometric soften with decrease viscosity.

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